As part of the APCER & Hotspot 2025 site visit program, participants toured TSMC’s Taichung Zero Waste Manufacturing Center — a model facility demonstrating how advanced recycling technologies are driving the semiconductor industry toward a circular and net-zero future.
Due to strict factory regulations, visitors were not allowed to bring any electronic devices into the facility. As a result, on-site photography was prohibited, and the available images for this article are limited to official or illustrative materials provided by TSMC.
The Taichung Zero Waste Manufacturing Center operated by TSMC stands as one of the most advanced recycling facilities in the global semiconductor industry. Built to handle and transform waste generated by TSMC’s wafer fabs in Taiwan’s Central Science Park, the center applies state-of-the-art treatment technologies to convert production waste into valuable materials. It houses four major recycling lines, each dedicated to a specific type of waste, ensuring that almost every byproduct can be purified and reused in manufacturing or sold for industrial applications.
Fluoride Recycling
The fluoride recycling line focuses on recovering fluoride compounds from semiconductor waste streams and refining them for reuse. Waste liquids containing fluoride—such as hydrofluoric acid or various fluoride salts—are collected from wafer cleaning and etching processes. Through a combination of precipitation and membrane filtration, fluoride is separated from impurities and purified to electronic-grade standards. The refined material is then converted into high-value compounds such as calcium fluoride, which can be reused in wafer manufacturing or supplied to industries producing glass, ceramics, and specialty chemicals. Each batch undergoes rigorous quality testing to ensure it meets the strict purity levels required in semiconductor fabrication. This process not only reduces the amount of toxic fluoride discharged into the environment but also cuts the cost of purchasing new raw materials. During its trial phase from 2023 to 2024, this recycling line achieved full product utilization, proving both its environmental and economic effectiveness.
Silica Recycling
Another key operation at the center is the silica recycling line, designed to recover silica from industrial sludge and transform it into reusable materials. The sludge, produced during wastewater treatment and the chemical mechanical polishing (CMP) process, contains a significant amount of silica. By using advanced centrifugation and filtration systems, the silica is separated from other contaminants such as heavy metals and organic residues. It is then further purified through thermal and chemical treatments to achieve the high purity needed for electronic manufacturing or other industrial uses. The resulting recycled silica can be reintroduced into semiconductor production or sold to industries that manufacture cement, glass, or insulation materials. This process has allowed TSMC to virtually eliminate solid waste from its facilities in the Taichung Science Park and has significantly reduced the demand for mined silica sand — a resource that is becoming increasingly scarce worldwide.
Solvent Thermal Recovery
The solvent thermal recovery line is responsible for recycling organic solvents used in wafer cleaning and photolithography. These solvents, including acetone and isopropyl alcohol (IPA), are recovered from waste gases and liquids generated during high-temperature processes. Through a thermal distillation system, solvents are separated from other substances while the heat energy produced from combustion is reused to power the distillation process itself. This closed-loop system enhances energy efficiency while minimizing waste. The recovered solvents are then purified through additional filtration and chemical processing to reach electronic-grade standards before being reintroduced into production or distributed to other industries such as coatings, printing, or chemicals. This technology helps reduce volatile organic compound (VOC) emissions, conserves energy, and strengthens the economic value of TSMC’s circular manufacturing approach.
Isopropanol Recovery
A separate isopropanol recovery line focuses specifically on reclaiming high-purity IPA from liquid waste. Isopropanol is an essential cleaning agent in semiconductor production, and the growing demand for advanced nodes such as 3-nanometer and 2-nanometer chips has made IPA recycling increasingly important. The waste liquid containing IPA is distilled in fractional columns to separate it from water and other impurities. Additional purification steps, including ion exchange and nanofiltration, ensure purity levels above 99.9 percent — matching electronic-grade requirements. Each batch is tested using gas chromatography before being reused in TSMC’s fabs or supplied to partners within the supply chain. By recovering and refining IPA, the company not only reduces chemical import costs but also prevents potential pollution from liquid waste, reinforcing its circular economy model.
Supporting Systems and Integration
Complementing these four major recycling lines are several integrated sustainability systems that enhance the center’s overall performance. A rainwater collection and treatment system enables the recovery of up to two million cubic meters of groundwater annually, which can be reused for cooling or industrial processes. Solar panels installed on the rooftop provide part of the facility’s energy demand, cutting electricity-related carbon emissions. Additionally, TSMC is implementing a Polaris membrane-based carbon capture technology, scheduled for completion by the end of 2025. This system will extract carbon dioxide from flue gases for reuse or safe storage, with an expected reduction of approximately 40,000 tons of CO₂ equivalent per year.
Environmental and Economic Benefits
At full capacity, the Taichung Zero Waste Manufacturing Center processes more than 85 percent of the waste generated by TSMC’s fabs in the Central Taiwan Science Park, equivalent to around 130,000 tons annually. Every output from its recycling operations meets commercial or industrial reuse standards, resulting in a 100-percent product recovery rate. According to TSMC’s environmental profit and loss analysis, the facility helps save an estimated NT$1.5 billion (about USD 46 million) in environmental costs each year, while easing the burden on landfills and conserving natural resources.
Challenges and Innovation
Developing high-purity recycling processes for electronic-grade materials poses significant technical and financial challenges. The complexity of semiconductor waste requires the integration of multiple treatment methods — including distillation, chemical separation, and membrane filtration — and close collaboration with technology partners. To overcome these challenges, TSMC has teamed up with companies such as Chang Chun Petrochemical and Transcene to co-develop advanced nano-filtration and high-efficiency distillation systems. The introduction of the Polaris carbon capture technology further demonstrates TSMC’s commitment to innovation, as it not only lowers emissions but also creates new opportunities for reusing captured CO₂ in industrial applications.
Conclusion
The Taichung Zero Waste Manufacturing Center embodies TSMC’s vision of combining technological excellence with environmental responsibility. By recycling fluoride, silica, solvents, and isopropanol to high-purity standards, the company has established a circular model for semiconductor manufacturing that reduces waste, conserves resources, and strengthens supply resilience. Supported by renewable energy, water recovery, and carbon capture systems, the facility positions TSMC as a global leader in sustainable manufacturing — advancing the industry toward a truly zero-waste and net-zero future.